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Opt Express. 2011 Jan 3;19(1):175-84. doi: 10.1364/OE.19.000175.

Ultra-high resolution zone-doubled diffractive X-ray optics for the multi-keV regime.

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  • 1Paul Scherrer Institut, Villigen, Switzerland.


X-ray microscopy based on Fresnel zone plates is a powerful technique for sub-100 nm resolution imaging of biological and inorganic materials. Here, we report on the modeling, fabrication and characterization of zone-doubled Fresnel zone plates for the multi-keV regime (4-12 keV). We demonstrate unprecedented spatial resolution by resolving 15 nm lines and spaces in scanning transmission X-ray microscopy, and focusing diffraction efficiencies of 7.5% at 6.2 keV photon energy. These developments represent a significant step towards 10 nm spatial resolution for hard X-ray energies of up to 12 keV.

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