a, An SEM images of a graphene transistor with a self-aligned nanowire gate, the width of devices of about 2.64 μm. The inset shows an optical microscope image the overall device layout.
b, The cross-sectional SEM image of a typical device shows the self-aligned Pt thin film source and drain electrodes are well separated by the nanowire gate and precisely positioned next to the nanowire gate. The graphene below the nanowire gate is not clearly visible.
c, and
d, I
ds-V
TG transfer characteristics at V
ds = −1 V before and after the deposition of the self-aligned Pt source-drain electrodes.
e, The I
ds-V
ds output characteristics at various gate voltages (V
TG =0.0, 0.4, 0.8, 1.2, 1.6, and 2.0 V) for the
dIds self-aligned device.
f, Transconductance

at V
ds = −1 V as a function of top-gate voltage V
TG before (black) and after (red) the deposition of the self-aligned Pt source-drain electrodes, highlighting the self-alignment process increases the peak transconductance by a factor of > 60.
g, Two dimensional plot of the device conductance for varying V
BG and V
TG bias for self aligned device. The unit in the color scale is mS.
h, The top-gate Dirac point V
TG_Dirac at different V
BG, with which we can derive C
TG/C
BG≈38.