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Opt Express. 2010 Aug 16;18(17):18394-400. doi: 10.1364/OE.18.018394.

Biochemical sensing with a polymer-based micromachined Fabry-Perot sensor.

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  • 1Institute for Micromanufacturing, Louisiana Tech University, Ruston, LA 71272, USA.


A white-light source operated polymer-based micromachined Fabry-Perot biochemical sensor is reported. As a refractive-index sensitive optical sensor, its transducing signal varies upon the changes of the effective refractive index in the Fabry-Perot cavity. This sensor is fabricated from PDMS and glass. More specifically, this sensor is a micromachined Fabry-Perot interferometer (microFPI) and is fabricated by bonding a glass substrate and the soft-lithographically patterned PDMS. Several biochemicals have been detected with the microFPI biochemical sensors. Measurements show that rabbit IgG at a concentration of as low as 5 to 50 ng/ml can be detected even without any performance optimization of the devices.

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