Display Settings:

Format

Send to:

Choose Destination
We are sorry, but NCBI web applications do not support your browser and may not function properly. More information
Opt Express. 2010 Aug 16;18(17):18086-94. doi: 10.1364/OE.18.018086.

Temporally focused femtosecond laser pulses for low numerical aperture micromachining through optically transparent materials.

Author information

  • 1Center for Micro-integrated Optics for Advanced Bio-imaging and Control, Department of Physics, Colorado School of Mines, Golden, Colorado 80401, USA.

Abstract

Temporal focusing of spatially chirped femtosecond laser pulses overcomes previous limitations for ablating high aspect ratio features with low numerical aperture (NA) beams. Simultaneous spatial and temporal focusing reduces nonlinear interactions, such as self-focusing, prior to the focal plane so that deep (approximately 1 mm) features with parallel sidewalls are ablated at high material removal rates (25 microm(3) per 80 microJ pulse) at 0.04-0.05 NA. This technique is applied to the fabrication of microfluidic devices by ablation through the back surface of thick (6 mm) fused silica substrates. It is also used to ablate bone under aqueous immersion to produce craniotomies.

PMID:
20721196
[PubMed - indexed for MEDLINE]
PMCID:
PMC3408926
Free PMC Article

Images from this publication.See all images (8)Free text

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
PubMed Commons home

PubMed Commons

0 comments
How to join PubMed Commons

    Supplemental Content

    Full text links

    Icon for Optical Society of America Icon for PubMed Central
    Loading ...
    Write to the Help Desk