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Nano Lett. 2010 Aug 11;10(8):3168-72. doi: 10.1021/nl102066q.

Chip-scale nanofabrication of single spins and spin arrays in diamond.

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  • 1Center for Spintronics and Quantum Computation, University of California, Santa Barbara, California 93106, USA.

Abstract

We demonstrate a technique to nanofabricate nitrogen vacancy (NV) centers in diamond based on broad-beam nitrogen implantation through apertures in electron beam lithography resist. This method enables high-throughput nanofabrication of single NV centers on sub-100-nm length scales. Secondary ion mass spectroscopy measurements facilitate depth profiling of the implanted nitrogen to provide three-dimensional characterization of the NV center spatial distribution. Measurements of NV center coherence with on-chip coplanar waveguides suggest a pathway for incorporating this scalable nanofabrication technique in future quantum applications.

PMID:
20698632
[PubMed]
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