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Opt Express. 2010 Jun 21;18(13):14159-64. doi: 10.1364/OE.18.014159.

Nanoscale imaging using deep ultraviolet digital holographic microscopy.

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  • 1Institut für Technische Optik, Universität Stuttgart, Pfaffenwaldring 9, Stuttgart, Germany.


A deep ultraviolet off-axis digital holographic microscope (DHM) is presented. The microscope has been arranged with as least as possible optical elements in the imaging path to avoid aberration due to the non-perfect optical elements. A high resolution approach has been implemented in the setup using oblique illumination to overcome the limitation introduced by the optical system. To examine the resolution of the system a nano-structured template has been designed and the result confirms the submicron and nanoscale resolution of the arranged DHM setup.

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