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Appl Opt. 1989 Aug 15;28(16):3318-22. doi: 10.1364/AO.28.003318.

Properties of dielectric coatings produced by ion assisted deposition.

Abstract

Some metal oxides, fluorides, and ZnS films deposited by ion assisted deposition are investigated as a function of ion energy, ion variety, and ion source type. Both optical and mechanical properties, such as optical stability, absorption and scattering losses, laser damage threshold, and durability, are examined for samples deposited with the assistance of four kinds of ion source and various preparation conditions.

PMID:
20555697
[PubMed]
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