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Appl Opt. 1988 Jan 1;27(1):124-8. doi: 10.1364/AO.27.000124.

Heterodyne interferometry with a frequency-modulated laser diode.

Abstract

A digital phase measuring interferometer with a frequency-modulated laser diode using the integratedbucket technique is described. The injection current is continuously changed to introduce a time- varying phase difference between the two beams of an unbalanced Twyman-Green interferometer. The intensity of the interference patterns is integrated with a CCD array sensor for intervals of one-quarter period of the fringe. Using the intensity data a microcomputer calculates the phase to be detected. Some experimental results with the interferometer are presented; the rms repeatability obtained was lambda/80.

PMID:
20523556
[PubMed]
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