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Thin Solid Films. 2009 Jan 30;517(6):2048-2054.

Titanium-silicon oxide film structures for polarization-modulated infrared reflection absorption spectroscopy.

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  • 1Department of New Materials and Biosystems, Max Planck Institute for Metals Research, Heisenbergstrasse 3, 70569 Stuttgart, Germany.


We present a titanium-silicon oxide film structure that permits polarization modulated infrared reflection absorption spectroscopy on silicon oxide surfaces. The structure consists of a ~6 nm sputtered silicon oxide film on a ~200 nm sputtered titanium film. Characterization using conventional and scanning transmission electron microscopy, electron energy loss spectroscopy, X-ray photoelectron spectroscopy and X-ray reflectometry is presented. We demonstrate the use of this structure to investigate a selectively protein-resistant self-assembled monolayer (SAM) consisting of silane-anchored, biotin-terminated poly(ethylene glycol) (PEG). PEG-associated IR bands were observed. Measurements of protein-characteristic band intensities showed that this SAM adsorbed streptavidin whereas it repelled bovine serum albumin, as had been expected from its structure.

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