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Appl Opt. 1978 Sep 15;17(18):2930-3. doi: 10.1364/AO.17.002930.

Profile measurement using projection of running fringes.

Abstract

A method of profile control or measurement using projected fringes is presented. The fringes are dynamically translated over the object, and the phase of the signal picked up at a selected point on the surface is used to determine the depth or the depth error of the profile at this point. The method has the advantage of being contact-free, fast, accurate, and easily automated.

PMID:
20203900
[PubMed]
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