Send to

Choose Destination
See comment in PubMed Commons below
Opt Express. 2010 Jan 18;18(2):566-74. doi: 10.1364/OE.18.000566.

High aspect ratio taper-free microchannel fabrication using femtosecond Bessel beams.

Author information

  • 1FEMTO-ST Institute, Department of Optics P.M. Duffieux, UMR CNRS 6174, Université de Franche-Comté, Besançon, France.


We present a systematic study of femtosecond laser microchannel machining in glass using nondiffracting Bessel beams. In particular, our results identify a source and focusing parameter working window where high aspect ratio taper-free microchannels can be reproducibly produced without sample translation. With appropriate source parameters, we machine channels of 2 microm diameter and with aspect ratios up to 40. We propose the filamentation stability of the Bessel beam propagation as the critical factor underlying the controlled and reproducible results that have been obtained.

[PubMed - indexed for MEDLINE]
PubMed Commons home

PubMed Commons

How to join PubMed Commons

    Supplemental Content

    Full text links

    Icon for Optical Society of America
    Loading ...
    Write to the Help Desk