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Appl Opt. 2009 Oct 10;48(29):5561-6. doi: 10.1364/AO.48.005561.

Disturbance-free phase-shifting laser diode interferometer using adaptive feedback control.

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  • 1Niigata University, Faculty of Engineering, 8050 Ikarashi 2, Niigata 950-2181, Japan.


A feedback-control-equipped phase-shifting laser diode interferometer that eliminates external disturbance is proposed. The feedback loop is stabilized by adaptive control of the polarity of the interference signal. Conventional phase-shifting interferometry can be used with the feedback control, resulting in simplified signal processing and accurate measurement. Several experiments confirm the stability of the feedback control with a measurement repeatability of 1.8 nm.

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