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Opt Lett. 1984 Dec 1;9(12):539-41.

High-power argon excimer laser at 126 nm pumped by an electron beam.


A high-power argon excimer laser has been developed with an output power exceeding 2 MW in the VUV region at 126 nm. As an alternative to a conventional Al/MgF(2)-coated mirror, which was susceptible to damage, an uncoated quartz plate was successfully used as a reflector for reproducible high-power operation of the argon excimer laser without any mirror damage. Observation of the temporal behavior of the laser pulse in relation to that of the gain coefficient is discussed.

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