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Opt Express. 2007 May 28;15(11):6809-16.

Iterative algorithm for three flat test.

Abstract

Absolute planarity measurements by interferometry are classically made using three flats, compared two by two in the course of four or more tests. Data reduction is performed with various analytical methods. Here we present instead a data processing algorithm that converges to solution numerically by iteration. Examples are presented both on synthetic interferograms and on experimental data. High accuracy and versatility of the approach are demonstrated.

PMID:
19546992
[PubMed]
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