Display Settings:

Format

Send to:

Choose Destination
Opt Express. 2006 Jun 12;14(12):5558-70.

Demonstrating sub-nm closed loop MEMS flattening.

Abstract

Ground based high-contrast imaging (e.g. extrasolar giant planet detection) has demanding wavefront control requirements two orders of magnitude more precise than standard adaptive optics systems. We demonstrate that these requirements can be achieved with a 1024-Micro-Electrical-Mechanical-Systems (MEMS) deformable mirror having an actuator spacing of 340 microm and a stroke of approximately 1 microm, over an active aperture 27 actuators across. We have flattened the mirror to a residual wavefront error of 0.54 nm rms within the range of controllable spatial frequencies. Individual contributors to final wavefront quality, such as voltage response and uniformity, have been identified and characterized.

PMID:
19516724
[PubMed]
PubMed Commons home

PubMed Commons

0 comments
How to join PubMed Commons

    Supplemental Content

    Icon for Optical Society of America
    Loading ...
    Write to the Help Desk