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Opt Express. 2004 Oct 18;12(21):5117-24.

Direct spectral phase function calculation for dispersive interferometric thickness profilometry.

Abstract

A direct spectral phase function calculation method based on spectral phase shifting is described. We show experimentally that the direct phase function calculation method can provide a simple and fast solution in calculating the spectral phase function, while maintaining the same level of accurate measurement capability as that based on the Fourier transform approach.

PMID:
19484066
[PubMed]
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