Format

Send to:

Choose Destination
See comment in PubMed Commons below
Opt Express. 2002 Apr 8;10(7):303-8.

Cost-effective fabrication of microlenses on hybrid sol-gel glass with a high-energy beam-sensitive gray-scale mask.

Abstract

A negative-tone inorganic-organic hybrid SiO(2):TiO(2) glass is investigated for fabrication of refractive microlenses. This sol-gel material enjoys an advantage over materials used in conventional photoresist-based fabrication techniques in that it lends itself to a single-step etching-free process. The application of a high-energy beam-sensitive (HEBS) mask provides a reliable and simple method for fabrication of three-dimensional micro-optical elements with a single UV exposure. The technique of using the sol-gel material with the HEBS gray-scale mask has considerable potential for low-cost mass production of continuous-phase-level diffractive optical elements and micro-optical structures.

PMID:
19436361
[PubMed]
PubMed Commons home

PubMed Commons

0 comments
How to join PubMed Commons

    Supplemental Content

    Full text links

    Icon for Optical Society of America
    Loading ...
    Write to the Help Desk