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Opt Express. 2009 May 11;17(10):8558-66.

1.3 microm-wavelength phase-locked VCSEL arrays incorporating patterned tunnel junction.

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  • 1Ecole Polytechnique Federale de Lausanne (EPFL), Laboratory of Physics of Nanostructures, Lausanne, Switzerland.


We report the fabrication and the performance of phase-locked VCSEL arrays emitting near 1310 nm wavelength. The arrays were fabricated using double wafer fusion by patterning a tunnel junction layer, which serves to define the individual single mode array elements. Phase-locking in both one-dimensional and two-dimensional array configurations was confirmed by means of far field and spectral measurements as well as theoretical modeling. CW output powers of more than 12 mW were achieved.

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