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Opt Lett. 2008 Sep 1;33(17):1990-2.

Through-focus scanning-optical-microscope imaging method for nanoscale dimensional analysis.

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  • 1National Institute of Standards and Technology, Gaithersburg, MD 20899, USA. ravikiran.attota@nist.gov

Abstract

We present a novel optical technique that produces nanometer dimensional measurement sensitivity using a conventional bright-field optical microscope, by analyzing through-focus scanning-optical-microscope images obtained at different focus positions. In principle, this technique can be used to identify which dimension is changing between two nanosized targets and to determine the dimension using a library-matching method. This methodology has potential utility for a wide range of target geometries and application areas, including nanometrology, nanomanufacturing, semiconductor process control, and biotechnology.

PMID:
18758588
[PubMed]
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