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Langmuir. 2008 Sep 16;24(18):9929-32. doi: 10.1021/la800948w. Epub 2008 Aug 19.

Photochemical modification and patterning of SU-8 using anthraquinone photolinkers.

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  • 1Department of Micro and Nanotechnology, Technical University of Denmark, DTU Nanotech, Kongens Lyngby, Denmark.


Bioactive protein patterns and microarrays achieved by selective localization of biomolecules find various applications in biosensors, bio-microelectromechanical systems (bio-MEMS), and in basic protein studies. In this paper we describe simple photochemical methods to fabricate two-dimensional patterns on a Novolac A derivative polymer (SU-8) and, subsequently, their functionalization with biomolecules. Anthraquinone (AQ) derivatives are used to chemically modify and pattern SU-8 surfaces. Features as small as 20 mum are obtained when using uncollimated light. The X-Y spatial resolution of micropatterned AQ molecules is improved to 1.5 mum when a collimated light source is used. This micropatterning process will be important for the functionalization of MEMS-based biosensors. The method saves several processing steps and can be integrated in cleanroom fabrication thus avoiding contamination of the sensor surfaces.

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