Instrument Electronics and Sensors Section, NASA Jet Propulsion Laboratory, California Institute of Technology, 4800 Oak Grove Dr., Pasadena, California 91109, USA. willis@jpl.nasa.gov
Photolithographically defined monolithic membrane valves utilizing Fluorocur perfluoropolyether (PFPE) were fabricated and characterized to be essentially unaltered after one million actuations and exposure to the environmental stresses associated with in situ exploration of Mars.