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Opt Express. 2008 May 12;16(10):7153-60.

Optical characterization of photonic crystal slabs using orthogonally oriented polarization filters.

Author information

  • 1Light Technology Institute, Universität Karlsruhe (TH), Engesser Str. 13, 76131 Karlsruhe, Germany. Yousef.Nazirizadeh@lti.uni-karlsruhe.de

Abstract

We present an experimental method for direct analysis of guided-mode resonances in photonic crystal slab structures using transmission measurements. By positioning the photonic crystal slab between orthogonally oriented polarization filters light transmission is suppressed except for the guided-mode resonances. Angle resolved transmission measurements with crossed polarizers are performed to obtain the band structure around the Gamma-point. Results are compared to mode simulations. Spatially resolved measurements in a confocal microscope setup are used for homogeneity characterizations. Stitching errors and inhomogeneities in exposure dose down to 1.3% in photonic crystal slabs fabricated by electron beam lithography are observed using this method.

PMID:
18545418
[PubMed - indexed for MEDLINE]
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