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Opt Express. 2008 Jan 7;16(1):340-54.

Absolute planarity with three-flat test: an iterative approach with Zernike polynomials.

Author information

  • 1CNR - Istituto Nazionale di Ottica Applicata, Largo E. Fermi 6, 50125 Firenze, Italy. maurizio.vannoni@inoa.it

Abstract

An iterative algorithm to analyze three-flat test data for absolute planarity measurements is presented. Using the properties of Zernike polynomial representations, results are achieved in a fast and effective manner. Details and demonstrative examples are provided.

PMID:
18521166
[PubMed - indexed for MEDLINE]
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