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Appl Opt. 2001 Oct 20;40(30):5539-44.

Characterization of Diffraction Gratings by use of a Tabletop Soft-X-Ray Laser.


We have demonstrated the use of a high-repetition-rate 46.9-nm tabletop laser to characterize diffraction gratings designed for grazing-incidence operation in the soft-x-ray spectral region. The efficiencies for various diffraction orders were measured as a function of angle of incidence and compared with the results of model simulations. This measurement technique provides benchmarks with which to improve electromagnetic codes used in the design of soft-x-ray diffraction gratings. The results illustrate the potential of compact tabletop soft-x-ray lasers for use as a new tool for characterization of short-wavelength optics at the manufacturer's site.

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