Test of opticlean strip coating material for removing surface contamination.

The strip coating material, Opticlean, which has been reformulated, has been shown to remove 1-5-mum-diameter particles as well as contamination remaining from previous drag wipe cleaning on a used silicon wafer. In addition, no residue that produced scattering was found on a fresh silicon wafer when Opticlean was applied and then stripped off. The total integrated scattering technique used for the measurements could measure scattering levels of He-Ne laser light as low as a few ppm (parts in 10(6)), corresponding to a surface roughness of <1 A rms.

PMID: 18345196 [PubMed - in process]