Display Settings:

Format

Send to:

Choose Destination
See comment in PubMed Commons below
Appl Opt. 1999 May 10;38(14):3068-76.

Stray-light effects of diffractive beam-shaping elements in optical microsystems.

Author information

  • 1Centre Suisse d'Electronique et de Microtechnique,Badenerstrasse 569, 8048 Zurich, Switzerland.

Abstract

The use of diffractive beam-shaping elements in hybrid or monolithic microsystems is investigated. Compact optical systems require diffractive structures with small grating periods for creating large deflection angles. Such elements are difficult to fabricate while a low stray-light level is maintained. In addition, because of the small geometrical dimensions and the short propagation lengths in an optomechanical microsystem, any stray light generated by the diffractive structure critically affects the overall optical performance. A model for the estimation of the interference effects between the designed and the unwanted diffraction orders is developed and applied to an example of a collimating diffractive optical element. On the basis of theoretical and experimental results, design rules for the application of diffractive beam-shaping elements in microsystems are derived.

PMID:
18319893
[PubMed]
PubMed Commons home

PubMed Commons

0 comments
How to join PubMed Commons

    Supplemental Content

    Loading ...
    Write to the Help Desk