Block diagram of

calibration procedure (offline case). To initialize the calibration procedure, perturbations are injected into the drive signal of the stage, which causes perturbations in the probe position relative to laser. The small changes in the probe position cause small changes in the QPD signals according to

the true P-to-Q map. Using acquired QPD signals and stage positions as the input-output data, three second-order polynomials in centralized QPD signals are regressed, one for each axis of motion. A family of the three polynomials comprises

the estimated Q-to-P map. This is used to measure the probe position relative to the laser, which is also the error signal for the position feedback loop that is trying to keep the probe centered in the laser.