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Appl Opt. 2007 Nov 10;46(32):7829-35.

Digital holographic microscopy in the deep (193 nm) ultraviolet.

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  • 1Institut für Technische Optik, Universität Stuttgart, Pfaffenwaldring 9, 70569 Stuttgart, Germany.


We present a system based on digital holography suitable for the investigation of microscopic objects. To increase the resolution of the system a deep (193 nm) UV laser source has been used. A method for compensating aberrations due to the non-perfect optical elements used for the recording has been developed. The system allows the investigation of reflecting and transmitting samples.

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