The time-of-flight mass spectra of tris(2,2,6,6-tetramethyl-3,5-heptanedionato) lanthanide(III) [or Ln(thd)3 with Ln = Eu, Tb, Gd] produced by laser-induced multiphoton ionization in a supersonic expansion were studied as a function of laser excitation wavelength. Resonance-enhanced multiphoton ionization (REMPI), monitoring the Eu(I) ion signal from gas-phase Eu(thd)3, was observed in three distinct visible-excitation regions, corresponding to electronic absorption transitions on neutral Eu(0) atoms. The confirmation of the presence of Eu(0) atoms in the beam supports the proposed mechanism for the production of Ln atoms through sequential dissociation of neutral thd ligands from the metal following photoexcitation into ligand-to-metal charge-transfer (LMCT) states. Evidence is also presented that the LnO+ and LnOH+ fragments observed in the mass spectrum are produced via a separate, competing fragmentation pathway. The branching ratios between the two fragmentation pathways are compared for Ln(thd)3 (Ln = Eu, Tb, Gd). The ligand-dissociation pathway that produces Ln atoms appears to be more favorable in Ln(thd)3 complexes with low-lying LMCT states. Finally, the observation of the Tb2(thd)6+ dimer and its associated fragmentation pattern, as well as the presence of metal carbides, which are relevant to carbon contamination in chemical vapor deposition, is discussed.