In this study, we have examined both the effect of alkyl chain length and anion composition on the 1-alkyl-3-methylimidazolium (C(n)mim, n = 4, 6, 8, 10, and 12) structure and orientation at the room-temperature ionic liquid (RTIL)/SiO(2) interface by sum-frequency vibrational spectroscopy (SFVS). Four different anions were investigated in this study: tetrafluoroborate (BF(4)), hexafluorophosphate (PF(6)), bis(trifluoromethylsulfonyl)imide (BMSI), and bis(pentafluoroethylsulfonyl)imide (BETI). It was found that the alkyl chain in BMSI and BETI RTILs showed a decrease in gauche defects with an increase in chain length, whereas the alkyl chains of the BF(4) and PF(6) RTILs have virtually no gauche defects regardless of chain length. The tilt of the alkyl chain lies predominantly perpendicular to the surface for all the RTILs examined. A strong correlation between the HCCH vs tilt angle and alkyl chain length was observed; as the alkyl chain is lengthened the HCCH vs lies more perpendicular to the SiO(2) surface. The results of this study suggest that the length of the alkyl chain dictates to a large degree the orientation of the imidazolium cation at the surface, regardless of anion composition. To a lesser extent, the HCCH vs tilt of the imidazolium ring of the cation also appears to be correlated to the surface charge density of the SiO(2). As the SiO(2) surface charge density becomes more negative the HCCH vs tilt angle lies more parallel to the surface.