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Appl Opt. 2006 Sep 1;45(25):6586-90.

F2-laser-machined submicrometer gratings in thin dielectric films for resonant grating waveguide applications.

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  • 1Laser-Laboratorium Göttingen e.V., Nonlinear Optics, Germany. mbader@llg.gwdg.de

Abstract

Surface-relief gratings with submicrometer modulation periods were ablated by F2-laser radiation in thin metal-oxide films to produce resonant grating waveguide structures. For 150 nm films of Nb2O5, grating amplitudes in the range of 5-50 nm could be reproducibly excised with a controlled exposure of a laser energy density and a number of pulses within a narrow processing window. Resonant coupling of 800 nm ultrashort pulsed laser light into the resulting grating waveguide structure is verified with reflection and transmission spectra and satisfactorily modeled by coupled-mode theory. The laser-fabricated grating waveguides are attractive for high damage threshold reflectors and biosensor applications.

PMID:
16912799
[PubMed]
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