Display Settings:


Send to:

Choose Destination
See comment in PubMed Commons below
Appl Opt. 2006 Sep 1;45(25):6586-90.

F2-laser-machined submicrometer gratings in thin dielectric films for resonant grating waveguide applications.

Author information

  • 1Laser-Laboratorium Göttingen e.V., Nonlinear Optics, Germany. mbader@llg.gwdg.de


Surface-relief gratings with submicrometer modulation periods were ablated by F2-laser radiation in thin metal-oxide films to produce resonant grating waveguide structures. For 150 nm films of Nb2O5, grating amplitudes in the range of 5-50 nm could be reproducibly excised with a controlled exposure of a laser energy density and a number of pulses within a narrow processing window. Resonant coupling of 800 nm ultrashort pulsed laser light into the resulting grating waveguide structure is verified with reflection and transmission spectra and satisfactorily modeled by coupled-mode theory. The laser-fabricated grating waveguides are attractive for high damage threshold reflectors and biosensor applications.

PubMed Commons home

PubMed Commons

How to join PubMed Commons

    Supplemental Content

    Full text links

    Icon for Optical Society of America
    Loading ...
    Write to the Help Desk