DNA microarrays require tens of thousands of deoxyoligonucleotides to be registered in an addressable fashion through immobilization, so that they have the high-throughput capability of analyzing a large number of samples simultaneously in a minimal volume of each reagent. However, using immobilized DNA molecules on microarrays can impose certain technical problems for some assays. For example, high background noise has been observed in using immobilized oligonucleotide microarrays (DNA chip) for primer extension reactions. This noise may be associated with the reactions of secondary structures formed by the adjacent primers physically constrained on the surface. Single-base extension (SBE) of arrayed primers on a chip has been extensively used in mini-sequencing to examine single nucleotide polymorphisms (SNP). Some primers appeared to be extendable in the absence of any template and thus competed against the base extension directed by. the assay target such as genomic DNA. In this article, a method is reported that is capable of reducing template-independent extension by the substitution of a 2'-methoxyribonucleotide in the otherwise oligodeoxyribonucleotide primer. The surrogate compound placed at the 5'-end of the putative secondary structure sequence of a given primer was able to inhibit template-independent extension and to improve data quality of surface-attached primer extension assays.