X-ray topography analysis of acoustic wave fields in the SAW-resonator structures

Dmitry V Roshchupkin; Helen D Roshchupkina; Dmitry V Irzhak

doi:10.1109/tuffc.2005.1561678

X-ray topography analysis of acoustic wave fields in the SAW-resonator structures

IEEE Trans Ultrason Ferroelectr Freq Control. 2005 Nov;52(11):2081-7. doi: 10.1109/tuffc.2005.1561678.

Authors

Dmitry V Roshchupkin¹, Helen D Roshchupkina, Dmitry V Irzhak

Affiliation

¹ Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, Laboratory of X-ray Acoustooptics, Chernogolovka, Russian Federation. rochtch@ipmt-hpm.ac.ru

PMID: 16422421
DOI: 10.1109/tuffc.2005.1561678

Abstract

The formation of fields of standing surface acoustic waves (SAW) in LiNbO3 and La3Ga5SiO14 (LGS) crystals was studied by high-resolution topography method on a laboratory X-ray source. The fields of standing SAW were formed using SAW-resonator structures consisting of interdigital transducer (IDT) and reflecting gratings. The SAW amplitudes and power flow angles were measured by X-ray topography, diffraction in acoustic beam was visualized, and the SAW interaction with the crystal structure defects was studied.