Display Settings:

Format

Send to:

Choose Destination
See comment in PubMed Commons below
Nano Lett. 2005 Dec;5(12):2524-7.

Ordered arrays of silicon nanowires produced by nanosphere lithography and molecular beam epitaxy.

Author information

  • 1Interdisziplinäres Zentrum für Materialwissenschaften, Martin-Luther-Universität, Hoher Weg 8, D-06120 Halle, Germany. bodo.fuhrman@cmat.uni-halle.de

Abstract

Because of their importance in fundamental research and possible applications in nanotechnology and nanoelectronics, semiconductor nanowires have attracted much interest. In addition to the growth itself, the control of the size and location is an essential problem. Here we show the growth of ordered arrays of vertically aligned silicon nanowires by molecular beam epitaxy using prepatterned arrays of gold droplets on Si(111) substrates. The ordered arrays of gold particles were produced by nanosphere lithography.

PMID:
16351208
[PubMed - indexed for MEDLINE]
PubMed Commons home

PubMed Commons

0 comments
How to join PubMed Commons

    Supplemental Content

    Full text links

    Icon for American Chemical Society
    Loading ...
    Write to the Help Desk