For target monitoring of selected herbicides in groundwater transport studies, a precise and accurate method for the determination of atrazine (ATR), desethylatrazine (DEAT) and 2,6-dichlorobenzamide (BAM) was developed. The method is based on solid-phase extraction and GC-MS analysis. Deuterated standards are used as surrogates for calibration by the overall procedure. For legal requirements the method described was validated and is regularly subject to external quality control. Typical limits of detection are 2 ng/l. Uncertainty contributions were evaluated using the GUM workbench modelling software. At the concentration level of interest (100 ng/l), an expanded uncertainty of no more than 10% was estimated. Accurate data on the distribution of ATR, DEAT and BAM in affected well fields enabled operational changes to be implemented to control the drinking water supply according to legal requirements.