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Phys Rev Lett. 2005 Jan 21;94(2):027602. Epub 2005 Jan 19.

Dielectric properties of high-kappa oxides: theory and experiment for Lu2O3.

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  • 1Laboratorio Nazionale Materiali e Dispositivi per la Microelettronica MDM-INFM, via Olivetti 2, 20041 Agrate Brianza (MI), Italy.


We present a combined experimental and theoretical analysis of the dielectric and vibrational properties of crystalline lutetium oxide in its ground-state bixbyite structure. The vibrational dielectric function of Lu2O3 thin films grown by atomic-layer deposition was studied by infrared transmission and reflection-absorption spectroscopies, selectively accessing transverse and longitudinal optical frequencies. The static dielectric constant is extracted analyzing the infrared response. We also present first-principles density-functional linear-response calculations, which are in close agreement with experiment, and provide insight into the microscopic nature of vibrational spectra and dielectric properties.

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