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Appl Opt. 2004 Jan 20;43(3):575-8.

Localized self-volume growth in hybrid sol-gel glass induced by ultraviolet radiation with a gray-scale mask.

Author information

  • 1Photonics Research Centre, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798.

Abstract

UV-induced self-volume growth of the hybrid sol-gel glass was investigated for fabrication of an arbitrary-surface relief structure with a user-defined gray scale mask. The gray scale mask was generated through exposure of a high-energy beam-sensitive glass under an electron beam. Saw-tooth gratings of different periods were fabricated by a simple UV exposure through the gray-scale mask. Experimental results showed that the smaller the period is, the shallower the depth obtained owing to the self-volume growth effect is.

PMID:
14765915
[PubMed]
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