Automated analysis of SEM X-ray spectral images: a powerful new microanalysis tool

Microsc Microanal. 2003 Feb;9(1):1-17. doi: 10.1017/S1431927603030058.

Abstract

Spectral imaging in the scanning electron microscope (SEM) equipped with an energy-dispersive X-ray (EDX) analyzer has the potential to be a powerful tool for chemical phase identification, but the large data sets have, in the past, proved too large to efficiently analyze. In the present work, we describe the application of a new automated, unbiased, multivariate statistical analysis technique to very large X-ray spectral image data sets. The method, based in part on principal components analysis, returns physically accurate (all positive) component spectra and images in a few minutes on a standard personal computer. The efficacy of the technique for microanalysis is illustrated by the analysis of complex multi-phase materials, particulates, a diffusion couple, and a single-pixel-detection problem.

Publication types

  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Ceramics / analysis
  • Ceramics / chemistry
  • Copper / analysis
  • Copper / chemistry
  • Diffusion
  • Electron Probe Microanalysis / methods
  • Electron Probe Microanalysis / statistics & numerical data
  • Image Processing, Computer-Assisted
  • Metals / analysis
  • Metals / chemistry
  • Microscopy, Electron, Scanning / methods*
  • Microscopy, Electron, Scanning / statistics & numerical data
  • Multivariate Analysis
  • Nickel / analysis
  • Nickel / chemistry
  • Particle Size
  • Principal Component Analysis
  • Spectrum Analysis / methods*
  • Spectrum Analysis / statistics & numerical data
  • X-Rays

Substances

  • Metals
  • Copper
  • Nickel