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Phys Med Biol. 2002 Nov 7;47(21):3749-53.

Development of a THz spectroscopic imaging system.

Author information

  • 1TOCHIGI Nikon Corporation, 770 Midori, Ohtawara, Tochigi 324-8625, Japan.

Abstract

We have developed a real-time THz imaging system based on the two-dimensional (2D) electro-optic (EO) sampling technique. Employing the 2D EO-sampling technique, we can obtain THz images using a CCD camera at a video rate of up to 30 frames per second. A spatial resolution of 1.4 mm was achieved. This resolution was reasonably close to the theoretical limit determined by diffraction. We observed not only static objects but also moving ones. To acquire spectroscopic information, time-domain images were collected. By processing these images on a computer, we can obtain spectroscopic images. Spectroscopy for silicon wafers was demonstrated.

PMID:
12452563
[PubMed - indexed for MEDLINE]
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