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Appl Opt. 2002 Sep 10;41(26):5503-11.

High-accuracy position and orientation measurement of extended two-dimensional surfaces by a phase-sensitive vision method.

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  • 1Laboratoire d'Optique P.M. Duffieux, Université de Franche-Comté, U.M.R. C.N.R.S. 6603, Besançon, France.


We introduced recently phase measurements usually performed in interferometry to the domain of image processing and intelligent vision [IEEE Trans. Instrum. Meas. 49, 867 (2000)]. Our purpose is to sense with a high accuracy the position, orientation, and displacement of two-dimensional (2D) surfaces observed by a static vision system. We report on significant improvements of the method. Experimental measurements reveal a peak-valley noise of approximately 10(-2) CCD pixel, corresponding approximately to a 10(-3) period of the phase reference pattern. Then the observation of 10 microm scaled features enables an accuracy of a few nm in the position sensing of the phase reference pattern for the extended 2D measurement range.

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