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Appl Opt. 2002 Sep 1;41(25):5249-55.

Design and plasma deposition of dispersion-corrected multiband rugate filters.

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  • 1Department of Engineering Physics, Ecole Polytechnique de Montréal, Québec, Canada.


Inverse Fourier transform method has been commonly used for designing complex inhomogeneous optical coatings. Since it assumes dispersion-free optical constants, introducing real optical materials induces shifts in the position of reflectance bands in multiband inhomogeneous minus (rugate) filters. We propose a simple method for considering optical dispersion in the synthesis of multiband rugate filter designs. Model filters designed with this method were fabricated on glass and polycarbonate substrates by plasma-enhanced chemical vapor deposition of silicon oxynitrides and SiO2/TiO2 mixtures with precisely controlled composition gradients.

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