Anomalous sheath heating in a low pressure rf discharge in nitrogen
Phys Rev Lett
.
1992 Dec 14;69(24):3511-3514.
doi: 10.1103/PhysRevLett.69.3511.
Authors
MM Turner
,
MB Hopkins
PMID:
10046840
DOI:
10.1103/PhysRevLett.69.3511
No abstract available