Table 9.4US FED STD 209E Clean Room Classification

ClassMaximum Particles/ft3ISO Equivalent
>0.1 μm>0.2 μm>0.3 μm>0.5 μm>5 μm
135731ISO 3
10350753010ISO 4
100750300100ISO 5
1,0001,0007ISO 6
10,00010,00070ISO 7
100,000100,000700ISO 8

SOURCE : ANSI/IEST/ISO 14644-1:1999.

From: 9, Laboratory Facilities

Cover of Prudent Practices in the Laboratory
Prudent Practices in the Laboratory: Handling and Management of Chemical Hazards: Updated Version.
National Research Council (US) Committee on Prudent Practices in the Laboratory.
Washington (DC): National Academies Press (US); 2011.
Copyright © 2011, National Academy of Sciences.

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